Parameter preserving Model Order Reduction of a Flow Meter

Model order reduction techniques are known to work reliably for finite-element-type simulations of MEMS devices. These techniques can tremendously shorten computational times for transient and harmonic analyses. However, standard model reduction techniques cannot be applied if the equation system incorporates timevarying matrices or parameters that are to be preserved for the reduced model. At the same time, if one aims at automatic compact model generation it is most likely that there are parameters that have to be preserved. In this paper we demonstrate a method, based on a multivariant Padé-type expansion, that can preserve scalar parameters or functions during the reduction process. We show that this method is applicable to convectiondiffusion type problems. As a technical example we investigate a micro anemometer.